Imprinted large-scale high density polymer nanopillars for organic solar cells

Mukti Aryal, Fatih Buyukserin, Kamil Mielczarek, Xiao Mei Zhao, Jinming Gao, Anvar Zakhidov, Wenchuang Hu

Research output: Contribution to journalArticlepeer-review

99 Scopus citations


Nanoimprint with a large-scale nanoporous Si mold is developed to fabricate high density periodic nanopillars (∼ 1010 cm2) in various functional polymers. A anodic alumina membrane is first obtained using electrochemical anodization. The membrane is used as a mask for a two-step plasma etching process to obtain a Si mold of 50-80 nm wide and 100-900 nm deep pores. The mold is used in nanoimprint lithography to fabricate ordered and high density polymer nanopillars and nanopores in SU-8, hydrogen silsesquixane, polymethylmethacrylate, poly(3-hexylthiophane) (P3HT), and phenyl-C61-butyric acid methyl ester (PCBM). Then, the imprinted P3HT nanopillars were used to make bulk heterojunction solar cells by depositing PCBM on top of the pillars. Imprinting provides a way to precisely control the interdigitized heterojunction morphology, leading to improved solar cell performance.

Original languageEnglish (US)
Pages (from-to)2562-2566
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number6
StatePublished - 2008

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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