Light optical deformation measurements in microbars with nanometer resolution

E. Mazza, G. Danuser, J. Dual

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

In a microsample tensile test the deformation of the testing region is observed with a light microscope. Using a new vision algorithm, elongations are determined with nanometer resolution. The image analysis system operates with adaptive least squares correlation and contains a diagnostic tool which provides information about the computational precision and determinability of the parameters to be estimated. Various tests are performed to verify the reliability and sensitivity of the presented method and to show its potential in the field of micromechanics.

Original languageEnglish (US)
Pages (from-to)83-91
Number of pages9
JournalMicrosystem Technologies
Volume2
Issue number2
StatePublished - May 1996

Fingerprint

Micromechanics
Image analysis
Elongation
Microscopes
micromechanics
Testing
tensile tests
image analysis
elongation
microscopes
sensitivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Light optical deformation measurements in microbars with nanometer resolution. / Mazza, E.; Danuser, G.; Dual, J.

In: Microsystem Technologies, Vol. 2, No. 2, 05.1996, p. 83-91.

Research output: Contribution to journalArticle

@article{25149c5e8ecf413bbd3d3c6323ef14ab,
title = "Light optical deformation measurements in microbars with nanometer resolution",
abstract = "In a microsample tensile test the deformation of the testing region is observed with a light microscope. Using a new vision algorithm, elongations are determined with nanometer resolution. The image analysis system operates with adaptive least squares correlation and contains a diagnostic tool which provides information about the computational precision and determinability of the parameters to be estimated. Various tests are performed to verify the reliability and sensitivity of the presented method and to show its potential in the field of micromechanics.",
author = "E. Mazza and G. Danuser and J. Dual",
year = "1996",
month = "5",
language = "English (US)",
volume = "2",
pages = "83--91",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",
number = "2",

}

TY - JOUR

T1 - Light optical deformation measurements in microbars with nanometer resolution

AU - Mazza, E.

AU - Danuser, G.

AU - Dual, J.

PY - 1996/5

Y1 - 1996/5

N2 - In a microsample tensile test the deformation of the testing region is observed with a light microscope. Using a new vision algorithm, elongations are determined with nanometer resolution. The image analysis system operates with adaptive least squares correlation and contains a diagnostic tool which provides information about the computational precision and determinability of the parameters to be estimated. Various tests are performed to verify the reliability and sensitivity of the presented method and to show its potential in the field of micromechanics.

AB - In a microsample tensile test the deformation of the testing region is observed with a light microscope. Using a new vision algorithm, elongations are determined with nanometer resolution. The image analysis system operates with adaptive least squares correlation and contains a diagnostic tool which provides information about the computational precision and determinability of the parameters to be estimated. Various tests are performed to verify the reliability and sensitivity of the presented method and to show its potential in the field of micromechanics.

UR - http://www.scopus.com/inward/record.url?scp=2542532964&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2542532964&partnerID=8YFLogxK

M3 - Article

VL - 2

SP - 83

EP - 91

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 2

ER -