Light optical deformation measurements in microbars with nanometer resolution

E. Mazza, G. Danuser, J. Dual

Research output: Contribution to journalArticle

25 Scopus citations

Abstract

In a microsample tensile test the deformation of the testing region is observed with a light microscope. Using a new vision algorithm, elongations are determined with nanometer resolution. The image analysis system operates with adaptive least squares correlation and contains a diagnostic tool which provides information about the computational precision and determinability of the parameters to be estimated. Various tests are performed to verify the reliability and sensitivity of the presented method and to show its potential in the field of micromechanics.

Original languageEnglish (US)
Pages (from-to)83-91
Number of pages9
JournalMicrosystem Technologies
Volume2
Issue number2
DOIs
StatePublished - May 1996

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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