Micro RF tags for medical imaging

J. J. Bernstein, M. G. Bancu, R. Ciocan, Robert E Lenkinski, R. Marquis, A. Ivanishev, J. V. Frangioni

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents Micro Resonant Devices (MRD’s) which are visible in MRI scans. These LC resonators are fabricated using electroplated spiral inductors combined with thin-film Ta 2 O 5 capacitors, formed by a novel oxy-nitride plasma oxidation process. Arrays of resonators were fabricated with diameters of 0.3, 0.5 and 1 mm. To compensate for process variations, resonators were fabricated with parametrically varying capacitor areas. In this study, we characterize the first such devices for their detectability as a function of size, in salt-containing aqueous media and in vivo, using a clinical MRI scanner and a scanning UHF microscope.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsLeland Spangler, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages150-153
Number of pages4
ISBN (Electronic)9780964002494
StatePublished - Jan 1 2008
Externally publishedYes
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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  • Cite this

    Bernstein, J. J., Bancu, M. G., Ciocan, R., Lenkinski, R. E., Marquis, R., Ivanishev, A., & Frangioni, J. V. (2008). Micro RF tags for medical imaging. In L. Spangler, & K. L. Turner (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 150-153). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.