Micro RF tags for medical imaging

J. J. Bernstein, M. G. Bancu, R. Ciocan, R. E. Lenkinski, R. Marquis, A. Ivanishev, J. V. Frangioni

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents Micro Resonant Devices (MRD’s) which are visible in MRI scans. These LC resonators are fabricated using electroplated spiral inductors combined with thin-film Ta2O5 capacitors, formed by a novel oxy-nitride plasma oxidation process. Arrays of resonators were fabricated with diameters of 0.3, 0.5 and 1 mm. To compensate for process variations, resonators were fabricated with parametrically varying capacitor areas. In this study, we characterize the first such devices for their detectability as a function of size, in salt-containing aqueous media and in vivo, using a clinical MRI scanner and a scanning UHF microscope.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsKimberly L. Turner, Leland Spangler
PublisherTransducer Research Foundation
Pages150-153
Number of pages4
ISBN (Electronic)0964002477, 9780964002470
DOIs
StatePublished - 2008
Externally publishedYes
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island
Period6/1/086/5/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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