Structure of thin CrSi 2 films on Si(0 0 1)

O. Filonenko, M. Falke, H. Hortenbach, A. Henning, G. Beddies, H. J. Hinneberg

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The morphology and texture of CrSi 2 films grown on Si(0 0 1) is reported. The films have been prepared under ultra high vacuum conditions by reactive codeposition and by the template method. X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) analyses have been performed to investigate the influence of the substrate temperature and the template thickness on the silicide texture and morphology. XRD evidences that the major part of CrSi 2 crystallites grows with an orientation of CrSi 2 (0 0 1)[1 0 0] ∥ Si(0 0 1)[1 1 0] within all present experiments. Considering the morphology and preferred orientation of the crystallites the substrate temperature of 700°C is determined to be optimal for the codeposition growth method. A further improvement of the CrSi 2 (0 0 1) texture and an increase of the grain size by an order of magnitude is observed after deposition of 0.5nm Cr onto the Si(0 0 1) substrate at room temperature prior to the codeposition of Cr and Si at 700°C.

Original languageEnglish (US)
Pages (from-to)341-348
Number of pages8
JournalApplied Surface Science
Volume227
Issue number1-4
DOIs
StatePublished - Apr 15 2004
Externally publishedYes

Keywords

  • Chromium
  • MBE
  • Silicides
  • Template

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Structure of thin CrSi <sub>2</sub> films on Si(0 0 1)'. Together they form a unique fingerprint.

Cite this