Studies of preparing method of nano grain metal-insulator film Cu: CaF2

Zi Qiang Zhao, Lun Cun Wei, Hao Wang, Yun Cheng Zhong, Xi Ting Lu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A machine to prepare nano grain metal-insulator films, for example Cu:CaF2 film, by means of magnetron sputtering generating clusters and at the same time evaporating insulator medium, is introduced. This machine is suitable for almost all solid metal and semiconductor clusters. And with it, many kinds of function film series can be prepared. The size of cluster embedded in insulator is from 10 to 70 nm. The Cu cluster and medium CaF2 are both polycrystalline structure.

Original languageEnglish (US)
Pages (from-to)240-242
Number of pages3
JournalNuclear Science and Techniques/Hewuli
Volume7
Issue number4
StatePublished - Nov 1 1996

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insulators
Metals
metals
Magnetron sputtering
metal clusters
Semiconductor materials
magnetron sputtering

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Mechanical Engineering

Cite this

Zhao, Z. Q., Wei, L. C., Wang, H., Zhong, Y. C., & Lu, X. T. (1996). Studies of preparing method of nano grain metal-insulator film Cu: CaF2. Nuclear Science and Techniques/Hewuli, 7(4), 240-242.

Studies of preparing method of nano grain metal-insulator film Cu : CaF2. / Zhao, Zi Qiang; Wei, Lun Cun; Wang, Hao; Zhong, Yun Cheng; Lu, Xi Ting.

In: Nuclear Science and Techniques/Hewuli, Vol. 7, No. 4, 01.11.1996, p. 240-242.

Research output: Contribution to journalArticle

Zhao, ZQ, Wei, LC, Wang, H, Zhong, YC & Lu, XT 1996, 'Studies of preparing method of nano grain metal-insulator film Cu: CaF2', Nuclear Science and Techniques/Hewuli, vol. 7, no. 4, pp. 240-242.
Zhao, Zi Qiang ; Wei, Lun Cun ; Wang, Hao ; Zhong, Yun Cheng ; Lu, Xi Ting. / Studies of preparing method of nano grain metal-insulator film Cu : CaF2. In: Nuclear Science and Techniques/Hewuli. 1996 ; Vol. 7, No. 4. pp. 240-242.
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