A machine to prepare nano grain metal-insulator films, for example Cu:CaF2 film, by means of magnetron sputtering generating clusters and at the same time evaporating insulator medium, is introduced. This machine is suitable for almost all solid metal and semiconductor clusters. And with it, many kinds of function film series can be prepared. The size of cluster embedded in insulator is from 10 to 70 nm. The Cu cluster and medium CaF2 are both polycrystalline structure.
|Original language||English (US)|
|Number of pages||3|
|Journal||Nuclear Science and Techniques/Hewuli|
|Publication status||Published - Nov 1 1996|
ASJC Scopus subject areas
- Energy Engineering and Power Technology
- Mechanical Engineering