Study on preparation of nanograin metal insulator film

Ziqiang Zhao; Luncun Wei; Hao Wang; Yuncheng Zhong; Xiting Lu

Study on preparation of nanograin metal insulator film

Ziqiang Zhao, Luncun Wei, Hao Wang, Yuncheng Zhong, Xiting Lu

Research output: Contribution to journal › Article › peer-review

Abstract

A machine using magnetic control sputtering atom and evaporating insulator medium has been introduced. Several kinds of nanograin metal-insulator films, such as Cu: CaF₂ and Ti: CaF₂ films, were successfully prepared. Many kinds of function film series, such as solid metal and semiconductor clusters, can be prepared. The size of cluster embedded in insulator is from 10 nm to 70nm. the Cu cluster and CaF₂ medium are both polycrystalline structures.

Original language	English (US)
Pages (from-to)	534-535
Number of pages	2
Journal	Gongneng Cailiao/Journal of Functional Materials
Volume	27
Issue number	6
State	Published - Jan 1 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Cite this

@article{7ac888fdc0904ad38de32b03a2e17a84,

title = "Study on preparation of nanograin metal insulator film",

abstract = "A machine using magnetic control sputtering atom and evaporating insulator medium has been introduced. Several kinds of nanograin metal-insulator films, such as Cu: CaF2 and Ti: CaF2 films, were successfully prepared. Many kinds of function film series, such as solid metal and semiconductor clusters, can be prepared. The size of cluster embedded in insulator is from 10 nm to 70nm. the Cu cluster and CaF2 medium are both polycrystalline structures.",

author = "Ziqiang Zhao and Luncun Wei and Hao Wang and Yuncheng Zhong and Xiting Lu",

year = "1996",

month = jan,

day = "1",

language = "English (US)",

volume = "27",

pages = "534--535",

journal = "Gongneng Cailiao/Journal of Functional Materials",

issn = "1001-9731",

publisher = "Journal of Functional Materials",

number = "6",

}

TY - JOUR

T1 - Study on preparation of nanograin metal insulator film

AU - Zhao, Ziqiang

AU - Wei, Luncun

AU - Wang, Hao

AU - Zhong, Yuncheng

AU - Lu, Xiting

PY - 1996/1/1

Y1 - 1996/1/1

N2 - A machine using magnetic control sputtering atom and evaporating insulator medium has been introduced. Several kinds of nanograin metal-insulator films, such as Cu: CaF2 and Ti: CaF2 films, were successfully prepared. Many kinds of function film series, such as solid metal and semiconductor clusters, can be prepared. The size of cluster embedded in insulator is from 10 nm to 70nm. the Cu cluster and CaF2 medium are both polycrystalline structures.

AB - A machine using magnetic control sputtering atom and evaporating insulator medium has been introduced. Several kinds of nanograin metal-insulator films, such as Cu: CaF2 and Ti: CaF2 films, were successfully prepared. Many kinds of function film series, such as solid metal and semiconductor clusters, can be prepared. The size of cluster embedded in insulator is from 10 nm to 70nm. the Cu cluster and CaF2 medium are both polycrystalline structures.

UR - http://www.scopus.com/inward/record.url?scp=0030350290&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030350290&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0030350290

SN - 1001-9731

VL - 27

SP - 534

EP - 535

JO - Gongneng Cailiao/Journal of Functional Materials

JF - Gongneng Cailiao/Journal of Functional Materials

IS - 6

ER -

Study on preparation of nanograin metal insulator film

Abstract

ASJC Scopus subject areas

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