Study on preparation of nanograin metal insulator film

Ziqiang Zhao, Luncun Wei, Hao Wang, Yuncheng Zhong, Xiting Lu

Research output: Contribution to journalArticle

Abstract

A machine using magnetic control sputtering atom and evaporating insulator medium has been introduced. Several kinds of nanograin metal-insulator films, such as Cu: CaF2 and Ti: CaF2 films, were successfully prepared. Many kinds of function film series, such as solid metal and semiconductor clusters, can be prepared. The size of cluster embedded in insulator is from 10 nm to 70nm. the Cu cluster and CaF2 medium are both polycrystalline structures.

Original languageEnglish (US)
Pages (from-to)534-535
Number of pages2
JournalGongneng Cailiao/Journal of Functional Materials
Volume27
Issue number6
Publication statusPublished - Dec 1 1996

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Polymers and Plastics

Cite this

Zhao, Z., Wei, L., Wang, H., Zhong, Y., & Lu, X. (1996). Study on preparation of nanograin metal insulator film. Gongneng Cailiao/Journal of Functional Materials, 27(6), 534-535.